1. Field of the Invention The present invention r..

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1. Field of the Invention
The present invention relates to a process for manufacturing a semiconductor device, for example, a process for manufacturing a semiconductor device in which contact plug are formed on and buried in contact holes reaching a lower source/drain region
2. Description of the Related Art
Generally, a process for manufacturing a semiconductor device, for example, a process for manufacturing a semiconductor device in which contact plugs are buried in contact holes reaching a low conductivity region ( 50e0806aeb monsav
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